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Deposition of Lanthanum Zirconium Oxide High-k Films by Liquid Injection ALD and MOCVD

✍ Scribed by J. M. Gaskell; A. C. Jones; P. R. Chalker; M. Werner; H. C. Aspinall; S. Taylor; P. Taechakumput; P. N. Heys


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
477 KB
Volume
13
Category
Article
ISSN
0948-1907

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