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Growth of Lanthanum Silicate Thin Films by Liquid Injection MOCVD Using Tris[bis(trimethylsilyl)amido]lanthanum.

✍ Scribed by Helen C. Aspinall; Paul A. Williams; Jeffrey Gaskell; Anthony C. Jones; John L. Roberts; Lesley M. Smith; Paul R. Chalker; Gary W. Critchlow

Publisher: John Wiley and Sons
Year: 2003
Weight: 67 KB
Volume: 34
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200315024

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