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Atomic Layer Deposited Hafnium Oxide Gate Dielectrics for Charge-Based Biosensors

✍ Scribed by Chen, Yi Wei; Liu, Maozi; Kaneko, Tetsuya; McIntyre, Paul C.

Book ID: 118201628
Publisher: The Electrochemical Society
Year: 2010
Tongue: English
Weight: 281 KB
Volume: 13
Category: Article
ISSN: 1099-0062
DOI: 10.1149/1.3280224

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