Electrical and Interfacial Characterization of Atomic Layer Deposited High- κ Gate Dielectrics on GaAs for Advanced CMOS Devices

✍ Scribed by Dalapati, G.K.; Yi Tong; Wei-Yip Loh; Hoe Keat Mun; Byung Jin Cho

• Book ID: 114618834
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 271 KB
• Volume: 54
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2007.901261