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Antimony implanted in silicon – A thin layer reference material for surface analysis

✍ Scribed by K.H Ecker; A Berger; R Grötzschel; L Persson; U Wätjen

Book ID: 114164478
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 86 KB
Volume: 175-177
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00545-0

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