RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon – A multi-method approach to characterize and certify a reference material

✍ Scribed by K.H. Ecker; U. Wätjen; A. Berger; L. Persson; W. Pritzkow; M. Radtke; H. Riesemeier

• Book ID: 114165313
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 96 KB
• Volume: 188
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)01038-2