Contribution of ICP-IDMS to the certification of antimony implanted in a silicon wafer – comparison with RBS and INAA results

✍ Scribed by W. Pritzkow; J. Vogl; A. Berger; K. Ecker; R. Grötzschel; P. Klingbeil; L. Persson; G. Riebe; U. Wätjen

• Book ID: 105898259
• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 52 KB
• Volume: 371
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s002160100987