Investigation of microhardness of surface layers of silicon single crystals after alloying with boron by ion implantation: R I Garber et al, Investigation of Materials for New Technology, Collect, Tbilisi 1971, 82–88 (in Russian)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 176 KB
• Volume: 22
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(72)90613-6