Antenna configuration for uniform large-area inductively coupled plasma production

✍ Scribed by Kim, S. S.; Chang, H. Y.; Chang, C. S.; Yoon, N. S.

• Book ID: 126514565
• Publisher: American Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 321 KB
• Volume: 77
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.127021