Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units

✍ Scribed by Deguchi, Hiroshige; Yoneda, Hitoshi; Kato, Kenji; Kubota, Kiyoshi; Hayashi, Tsukasa; Ogata, Kiyoshi; Ebe, Akinori; Takenaka, Kosuke; Setsuhara, Yuichi

• Book ID: 126514782
• Publisher: Institute of Pure and Applied Physics
• Year: 2006
• Tongue: English
• Weight: 263 KB
• Volume: 45
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.45.8042