✦ LIBER ✦

Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units

✍ Scribed by Takenaka, Kosuke; Setsuhara, Yuichi; Nishisaka, Kazuaki; Ebe, Akinori; Sugiura, Shinya; Takahashi, Kazuo; Ono, Koichi

Book ID: 126514783
Publisher: Institute of Pure and Applied Physics
Year: 2006
Tongue: English
Weight: 170 KB
Volume: 45
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.45.8046

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of Amorphous Hydrogenat

Characterization of Amorphous Hydrogenated Carbon Formed by Low-Pressure Inductively Coupled Plasma Enhanced Chemical Vapor Deposition Using Multiple Low-Inductance Antenna Units

✍ Tsuda, Osamu; Ishihara, Masatou; Koga, Yoshinori; Fujiwara, Shuzo; Setsuhara, Yu 📂 Article 📅 2005 🏛 American Chemical Society 🌐 English ⚖ 414 KB

Uniformity of 500-mm cylindrical plasma

Uniformity of 500-mm cylindrical plasma source sustained with multiple low-inductance antenna units

✍ Yuichi Setsuhara; Daisuke Tsukiyama; Kosuke Takenaka 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 658 KB

Uniformity of plasma density and 4s excited Ar (Ar⁎) density profiles in a 500-mm cylindrical plasma source sustained with eight LIA units have been investigated with a fluid-simulation code. Uniformity of the simulated radial profiles of plasma density on the substrate holder located at a distance

Inductively Coupled Plasma Source with I

Inductively Coupled Plasma Source with Internal Straight Antenna

✍ Kanoh, Masaaki; Suzuki, Keiji; Tonotani, Jyunichi; Aoki, Katsuaki; Yamage, Masas 📂 Article 📅 2001 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 369 KB

Characterization of a low-frequency indu

Characterization of a low-frequency inductively coupled plasma source

✍ Tuszewski, M. 📂 Article 📅 1996 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 326 KB

Effects of Antenna Size and Configuratio

Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units

✍ Deguchi, Hiroshige; Yoneda, Hitoshi; Kato, Kenji; Kubota, Kiyoshi; Hayashi, Tsuk 📂 Article 📅 2006 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 263 KB

Plasma generation by inductive coupling

Plasma generation by inductive coupling with a planar resonant RF network antenna

✍ Lecoultre, S; Guittienne, Ph; Howling, A A; Fayet, P; Hollenstein, Ch 📂 Article 📅 2012 🏛 Institute of Physics 🌐 English ⚖ 440 KB