Inductively Coupled Plasma Source with Internal Straight Antenna

✍ Scribed by Kanoh, Masaaki; Suzuki, Keiji; Tonotani, Jyunichi; Aoki, Katsuaki; Yamage, Masashi

• Book ID: 127175240
• Publisher: Institute of Pure and Applied Physics
• Year: 2001
• Tongue: English
• Weight: 369 KB
• Volume: 40
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.40.5419