Characteristics of Internal Inductively Coupled Plasma Source for Ultralarge-Area Plasma Processing

✍ Scribed by Lim, Jong Hyeuk; Gweon, Gwang Ho; Hong, Seung Pyo; Kim, Kyong Nam; Kim, Yi Yeon; Yeom, Geun Young

• Book ID: 126514785
• Publisher: Institute of Pure and Applied Physics
• Year: 2010
• Tongue: English
• Weight: 239 KB
• Volume: 49
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.49.030213