Plasma Characteristics and Antenna Electrical Characteristics of an Internal Linear Inductively Coupled Plasma Source with a Multi-Polar Magnetic Field

✍ Scribed by Kyong Nam Kim; Jong Hyeuk Lim; Jung Kyun Park; Geun Young Yeom; Sung Hee Lee; Jae Koo Lee

• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 630 KB
• Volume: 28
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1007/s11090-007-9112-0