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Plasma generation by inductive coupling with a planar resonant RF network antenna

✍ Scribed by Lecoultre, S; Guittienne, Ph; Howling, A A; Fayet, P; Hollenstein, Ch

Book ID: 120368929
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 440 KB
Volume: 45
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/45/8/082001

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