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Characterization of Amorphous Hydrogenated Carbon Formed by Low-Pressure Inductively Coupled Plasma Enhanced Chemical Vapor Deposition Using Multiple Low-Inductance Antenna Units

✍ Scribed by Tsuda, Osamu; Ishihara, Masatou; Koga, Yoshinori; Fujiwara, Shuzo; Setsuhara, Yuichi; Sato, Naoyuki

Book ID: 127180282
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 414 KB
Volume: 109
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp045412z

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