Hardness and surface roughness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure-plasma enhanced chemical vapor deposition at low temperature

✍ Scribed by Noborisaka, Mayui; Horikoshi, Ryohei; Nagashima, So; Shirakura, Akira; Suzuki, Tetsuya

• Book ID: 118068803
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 477 KB
• Volume: 527
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2012.11.065