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X-ray reflectometry study of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition in a low pressure inductively coupled plasma

✍ Scribed by Salah, F.; Harzallah, B.; van der Lee, A.; Angleraud, B.; Begou, T.; Granier, A.

Book ID: 120405595
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 597 KB
Volume: 537
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.04.033

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