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Inductively coupled plasmas: Optimizing the inductive-coupling efficiency for large-area source design

✍ Scribed by Colpo, P.; Meziani, T.; Rossi, F.

Book ID: 125445191
Publisher: AVS (American Vacuum Society)
Year: 2005
Tongue: English
Weight: 748 KB
Volume: 23
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1854695

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