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A traveling wave-driven, inductively coupled large area plasma source

✍ Scribed by Wu, Yaoxi; Lieberman, M. A.

Book ID: 121331120
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 317 KB
Volume: 72
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.120890

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