AlGaN/GaN HEMTs grown on SiC substrates
β Scribed by Redwing, J.M.; Kelner, G.; Kruppa, W.; Binari, S.C.
- Book ID
- 115458966
- Publisher
- The Institution of Electrical Engineers
- Year
- 1997
- Tongue
- English
- Weight
- 281 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0013-5194
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π SIMILAR VOLUMES
Large periphery Al 0.25 Ga 0.75 N/GaN-HEMTs on SiC-substrates are fabricated on a 2-inch process line using stepper lithography. DC characteristics reveal current densities above 1.2 A/mm and intrinsic transconductances of 360 mS/mm. Depending on device size the maximum frequency of oscillation f ma
Subject classification: 73.30.+y; 73.40.Kp; S7.14 Undoped AlGaN/GaN HEMTs grown on SiC substrates have recently demonstrated record output power density of 10.7 W/mm (cw) and total output power of 10 W at 10 GHz (L. F. Eastman, Joint ONR/MURI Review (5/15-16, 2001), CA (USA) [1]). In this paper, we