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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - USJ formation using solid phase epitaxial regrowth and femtosencond laser anneal

✍ Scribed by Shih, Tzu-Lang; Chen, Sheng-Wen; Wu, Chang-Peng; Cheng, Chung-Wei; Chien, Chih-Wei; Lee, Wen-Hsi

Book ID: 120507736
Publisher: AIP
Year: 2012
Weight: 933 KB
Category: Article
DOI: 10.1063/1.4766506

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