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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Enhanced life ion source for germanium and carbon ion implantation

✍ Scribed by Hsieh, Tseh-Jen; Colvin, Neil; Kondratenko, Serguei

Book ID: 118183108
Publisher: AIP
Year: 2012
Weight: 867 KB
Category: Article
DOI: 10.1063/1.4766566

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