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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - BF[sub 3] PIII modeling: Implantation, amorphisation and diffusion

✍ Scribed by Essa, Z.; Cristiano, F.; Spiegel, Y.; Boulenc, P.; Qiu, Y.; Quillec, M.; Taleb, N.; Burenkov, A.; Hackenberg, M.; Bedel-Pereira, E.; Mortet, V.; Torregrosa, Frank; Tavernier, C.

Book ID: 120470470
Publisher: AIP
Year: 2012
Weight: 920 KB
Category: Article
DOI: 10.1063/1.4766532

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