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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Simulation of BF[sub 3] plasma immersion ion implantation into silicon

✍ Scribed by Burenkov, A.; Hahn, A.; Spiegel, Y.; Etienne, H.; Torregrosa, Frank

Book ID: 120470469
Publisher: AIP
Year: 2012
Weight: 895 KB
Category: Article
DOI: 10.1063/1.4766531

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