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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Extraction of aluminum ions from a plasma-sputter-type ion source

✍ Scribed by Wada, M.; Kasuya, T.; Kenmotsu, T.; Miyamoto, N.; Sasaki, D.

Book ID: 118183109
Publisher: AIP
Year: 2012
Weight: 858 KB
Category: Article
DOI: 10.1063/1.4766570

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