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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Defect detection in recrystallized ultra-shallow implanted silicon by multiwavelength-excited photoluminescence

✍ Scribed by Yoshimoto, Masahiro; Okutani, Masashi; Saikusa, Hiroki; Takashima, Shuhei; Yoo, Woo Sik

Book ID: 120087414
Publisher: AIP
Year: 2012
Weight: 997 KB
Category: Article
DOI: 10.1063/1.4766514

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