𝔖 Bobbio Scriptorium

✦ LIBER ✦

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - TCAD simulation of the co-implantation species C, F, and N in MOS transistors

✍ Scribed by Bazizi, E. M.; Mok, K. R. C.; Benistant, F.; Yeong, S. H.; Teo, R. S.; Zechner, C.

Book ID: 118066842
Publisher: AIP
Year: 2012
Weight: 865 KB
Category: Article
DOI: 10.1063/1.4766535

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

AIP Conference Proceedings [AIP ION IMPL

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Enhanced life ion source for germanium and carbon ion implantation

✍ Hsieh, Tseh-Jen; Colvin, Neil; Kondratenko, Serguei 📂 Article 📅 2012 🏛 AIP ⚖ 867 KB

AIP Conference Proceedings [AIP ION IMPL

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - BF[sub 3] PIII modeling: Implantation, amorphisation and diffusion

✍ Essa, Z.; Cristiano, F.; Spiegel, Y.; Boulenc, P.; Qiu, Y.; Quillec, M.; Taleb, 📂 Article 📅 2012 🏛 AIP ⚖ 920 KB

AIP Conference Proceedings [AIP ION IMPL

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Simulation of BF[sub 3] plasma immersion ion implantation into silicon

✍ Burenkov, A.; Hahn, A.; Spiegel, Y.; Etienne, H.; Torregrosa, Frank 📂 Article 📅 2012 🏛 AIP ⚖ 895 KB

AIP Conference Proceedings [AIP ION IMPL

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Extraction of aluminum ions from a plasma-sputter-type ion source

✍ Wada, M.; Kasuya, T.; Kenmotsu, T.; Miyamoto, N.; Sasaki, D. 📂 Article 📅 2012 🏛 AIP ⚖ 858 KB

AIP Conference Proceedings [AIP ION IMPL

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Electrical characterization of {311} defects and related junction leakage currents in n-type Si after ion implantation

✍ Nyamhere, C.; Cristiano, F.; Olivie, F.; Bedel-Pereira, E.; Boucher, J.; Essa, Z 📂 Article 📅 2012 🏛 AIP ⚖ 838 KB

AIP Conference Proceedings [AIP ION IMPL

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Defect detection in recrystallized ultra-shallow implanted silicon by multiwavelength-excited photoluminescence

✍ Yoshimoto, Masahiro; Okutani, Masashi; Saikusa, Hiroki; Takashima, Shuhei; Yoo, 📂 Article 📅 2012 🏛 AIP ⚖ 997 KB