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Actinometry of inductively coupled Cl[sub 2]âN[sub 2] plasmas for dry etching of GaAs

✍ Scribed by BruÌckl, Tobias; Zull, Heribert

Book ID: 121307719
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 401 KB
Volume: 98
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1994932

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