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Optical actinometry of Cl[sub 2], Cl, Cl[sup +], and Ar[sup +] densities in inductively coupled Cl[sub 2]–Ar plasmas

✍ Scribed by Fuller, N. C. M.; Herman, Irving P.; Donnelly, Vincent M.

Book ID: 121733348
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 318 KB
Volume: 90
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1391222

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