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Effect of sidewall passivation in BCl[sub 3]âN[sub 2] inductively coupled plasma etching of two-dimensional GaAs photonic crystals

✍ Scribed by Atlasov, Kirill A.; Gallo, Pascal; Rudra, Alok; Dwir, Benjamin; Kapon, Eli

Book ID: 121308014
Publisher: AVS (American Vacuum Society)
Year: 2009
Tongue: English
Weight: 697 KB
Volume: 27
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.3205004

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