Investigation of GaAs Dry Etching in a Planar Inductively Coupled BCl[sub 3] Plasma

✍ Scribed by Lim, W. T.; Baek, I. G.; Jung, P. G.; Lee, J. W.; Cho, G. S.; Lee, J. I.; Cho, K. S.; Pearton, S. J.

• Book ID: 121718813
• Publisher: The Electrochemical Society
• Year: 2004
• Tongue: English
• Weight: 742 KB
• Volume: 151
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.1643741