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ZnO nanocrystals/SiO2 multilayer structures fabricated by RF-magnetron sputtering

✍ Scribed by V. Pankratov; V. Osinniy; A. Nylandsted Larsen; B. Bech Nielsen


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
337 KB
Volume
404
Category
Article
ISSN
0921-4526

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Effects of substrate temperature on prop
✍ Gi-Seok Heo; In-Gi Gim; Jong-Woon Park; Kwang-Young Kim; Tae-Won Kim πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 696 KB

We have fabricated ITO-ZnO composition spread films to investigate the effects of substrate temperature on their electrical and optical properties by using combinatorial RF magnetron sputtering. It turned out by X-ray measurement that the film with zinc contents above 16.0 at% [Zn/(In+Zn+Sn)] showed