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Characterization of Sn and Si nanocrystals embedded in SiO2 matrix fabricated by magnetron co-sputtering

โœ Scribed by Shihua Huang; Yongyue Chen; Hong Xiao; Fang Lu


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
520 KB
Volume
205
Category
Article
ISSN
0257-8972

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โœ Zhou Xia; Shihua Huang ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 436 KB

Si nanocrystals (NCs) embedded in an SiC matrix were prepared by the deposition of Si-rich Si 1-x C x /SiC nanomultilayer films using magnetron sputtering, subsequently followed by thermal annealing in the range of 800 โˆผ 1200 ยฐC. As the annealing temperature increases to 1000 ยฐC, Si NCs begin to for