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Si/SiO2 multilayers: synthesis by reactive magnetron sputtering and photoluminescence emission

โœ Scribed by C. Ternon; F. Gourbilleau; R. Rizk; C. Dufour

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
492 KB
Volume
16
Category
Article
ISSN
1386-9477

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โœ P. Singh; F. Gourbilleau; C. Dufour; M. Levalois; J. Vicens; R. Rizk; P. Pellegr ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 340 KB

Erbium and silicon co-doped silica films have been fabricated by reactive magnetron sputtering. A correlation is made between the microstructure monitored by the hydrogen rate r H in the plasma and the photoluminescence properties. The erbium emission at 1.54 m is enhanced by the increase of r H whi