Microstructure and emission properties of Si nanograins and Er-doped silica films obtained by reactive magnetron co-sputtering
✍ Scribed by P. Singh; F. Gourbilleau; C. Dufour; M. Levalois; J. Vicens; R. Rizk; P. Pellegrino; C. Garcia; R.Ferré i Tomàs; B. Garrido
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 340 KB
- Volume
- 105
- Category
- Article
- ISSN
- 0921-5107
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✦ Synopsis
Erbium and silicon co-doped silica films have been fabricated by reactive magnetron sputtering. A correlation is made between the microstructure monitored by the hydrogen rate r H in the plasma and the photoluminescence properties. The erbium emission at 1.54 m is enhanced by the increase of r H while no emission due to the silicon nanograins is observed. An explanation is given by the microstructure revealed by Raman spectroscopy. Increasing r H values lead to the deposition of increasingly numerous silicon nanograins whose size decreases.
The assumption is made that the nanograins absorb the laser pumping light which creates electron-hole pairs. The energy resulting from their recombination is supposed to be transferred efficiently to the erbium ions.
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Cr-Si-N thin films were deposited by pulsed DC reactive dual-magnetron sputtering using Cr and Si targets, while various currents applied to the Si target allowed one to vary the Si content (C Si ) in the films. Microstructure, composition and mechanical properties were studied as a function of C Si