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Optimization of the optical properties of Er-doped Si-rich SiO2/SiO2 multilayers obtained by reactive magnetron sputtering

✍ Scribed by F. Gourbilleau; C. Dufour; R. Madelon; R. Rizk


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
115 KB
Volume
28
Category
Article
ISSN
0925-3467

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Erbium and silicon co-doped silica films have been fabricated by reactive magnetron sputtering. A correlation is made between the microstructure monitored by the hydrogen rate r H in the plasma and the photoluminescence properties. The erbium emission at 1.54 m is enhanced by the increase of r H whi