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ZnO: Hydroquinone superlattice structures fabricated by atomic/molecular layer deposition

✍ Scribed by Tynell, Tommi; Karppinen, Maarit

Book ID
122887384
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
620 KB
Volume
551
Category
Article
ISSN
0040-6090

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## Abstract We deposited ZnO thin films by atomic layer deposition (ALD) and then investigated the chemical and electrical characteristics after plasma treatment. The chemical bonding states were examined by X‐ray photoelectron spectroscopy (XPS). The XPS spectra of O 1s showed that the intensity o