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Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition

✍ Scribed by Tynell, Tommi; Yamauchi, Hisao; Karppinen, Maarit

Book ID: 121745492
Publisher: AVS (American Vacuum Society)
Year: 2014
Tongue: English
Weight: 532 KB
Volume: 32
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.4831751

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