Highly Conductive and Transparent Hybrid Organic–Inorganic Zincone Thin Films Using Atomic and Molecular Layer Deposition
✍ Scribed by Yoon, Byunghoon; Lee, Byoung H.; George, Steven M.
- Book ID
- 121231885
- Publisher
- American Chemical Society
- Year
- 2012
- Tongue
- English
- Weight
- 429 KB
- Volume
- 116
- Category
- Article
- ISSN
- 1932-7447
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## Abstract Atomic layer deposition (ALD) was used to fabricate transparent and conductive thin films of ZnO. Two hundred‐nano metre thick ZnO films were deposited on glass substrates at low growth temperatures varied between 120 and 240 °C. As zinc and oxygen precursors we used diethylzinc (DEZn)
## Abstract The molecular layer deposition (MLD) of a hybrid organic‐inorganic polymer based on zinc is demonstrated using sequential exposures of diethyl zinc (DEZ, Zn(CH~2~CH~3~)~2~) and ethylene glycol (EG, HOCH~2~CH~2~OH). This polymer is representative of a class of zinc alkoxide polymers with