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Correction to “Conformal Organic-Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol”

✍ Scribed by Gong,, Bo; Peng,, Qing; Parsons, Gregory N.


Book ID
127259362
Publisher
American Chemical Society
Year
2011
Tongue
English
Weight
603 KB
Volume
115
Category
Article
ISSN
0022-3654

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Molecular Layer Deposition of Hybrid Org
✍ Byunghoon Yoon; Jennifer L. O'Patchen; Dragos Seghete; Andrew S. Cavanagh; Steve 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 651 KB

## Abstract The molecular layer deposition (MLD) of a hybrid organic‐inorganic polymer based on zinc is demonstrated using sequential exposures of diethyl zinc (DEZ, Zn(CH~2~CH~3~)~2~) and ethylene glycol (EG, HOCH~2~CH~2~OH). This polymer is representative of a class of zinc alkoxide polymers with