Structural, optical, and electrical properties of Hf-doped ZnO films deposited by atomic layer deposition

✍ Scribed by Geng, Yang; Xie, Zhang-Yi; Yang, Wen; Xu, Sai-Sheng; Sun, Qing-Qing; Ding, Shi-Jin; Lu, Hong-Liang; Zhang, David Wei

• Book ID: 123195672
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 855 KB
• Volume: 232
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2013.04.050