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ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements

✍ Scribed by J.W. Elam; Z.A. Sechrist; S.M. George


Book ID
108388432
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
655 KB
Volume
414
Category
Article
ISSN
0040-6090

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