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Si/Al2O3/ZnO:Al capacitor arrays formed in electrochemically etched porous Si by atomic layer deposition

✍ Scribed by Marianna Kemell; Mikko Ritala; Markku Leskelä; Emmanuel Ossei-Wusu; Jürgen Carstensen; Helmut Föll

Book ID: 104051589
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 661 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.10.085

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