Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices

✍ Scribed by Wen-Ching Shih; Hong-Yi Su; Mu-Shiang Wu

• Book ID: 108290337
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 382 KB
• Volume: 517
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2008.12.008