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Transparent ZnO-TFT Arrays Fabricated by Atomic Layer Deposition

✍ Scribed by Park, Sang-Hee Ko; Hwang, Chi-Sun; Jeong, Hu Young; Chu, Hye Yong; Cho, Kyoung Ik

Book ID
127293581
Publisher
The Electrochemical Society
Year
2008
Tongue
English
Weight
724 KB
Volume
11
Category
Article
ISSN
1099-0062

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## Abstract We deposited ZnO thin films by atomic layer deposition (ALD) and then investigated the chemical and electrical characteristics after plasma treatment. The chemical bonding states were examined by X‐ray photoelectron spectroscopy (XPS). The XPS spectra of O 1s showed that the intensity o