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X-ray study of silicon distortion on deposition of diamond-like films

โœ Scribed by Victor Chaplanov; Igor Galkin; Aleksey Nefedov; Ilja Shipov; Sergey Yakimov; Svetlana Gerasimovich; Vera Elinson; Vladimir Sleptsov

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
289 KB
Volume
228
Category
Article
ISSN
0040-6090

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