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X-ray study of CVD aluminium thin films deposited on silicon and quartz substrates

✍ Scribed by D. Fatu; M. Muscalu; C.-E. Morosanu

Publisher: Elsevier Science
Year: 1980
Weight: 458 KB
Volume: 5
Category: Article
ISSN: 0390-6035
DOI: 10.1016/0390-6035(80)90032-2

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## Abstract In this paper we present study of cobalt phthalocyanine (CoPc) thin films deposited on quartz and diamond substrates. The different diamond substrates were obtained using chemical vapour deposition method (CVD). The micro‐Raman scattering spectra of CoPc thin films deposited onto quartz