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Internal stress of chemical vapour deposition diamond film on silicon

โœ Scribed by Y.H. Chiou; C.T. Hwang; M.Y. Han; J.H. Jou; Y.S. Chang; H.C. Shih


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
517 KB
Volume
253
Category
Article
ISSN
0040-6090

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