✦ LIBER ✦

Stress in chemically vapour-deposited silicon films

✍ Scribed by J. Adamczewska; T. Budzyński

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Correlation between stress and structure

✍ A.G. Noskov; E.B. Gorokhov; G.A. Sokolova; E.M. Trukhanov; S.I. Stenin 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 872 KB

Mechanical stresses in low pressure chem

✍ V.M. Koleshko; V.F. Belitsky; I.V. Kiryushin 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 868 KB

Internal stress of chemical vapour depos

✍ Y.H. Chiou; C.T. Hwang; M.Y. Han; J.H. Jou; Y.S. Chang; H.C. Shih 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 517 KB

Doping in chemically vapour deposited ep

✍ J Bloem 📂 Article 📅 1972 🏛 Elsevier Science 🌐 English ⚖ 394 KB

Characterization of low pressure chemica

✍ L.I. Popova; B.Z. Antov; A.V. Shopov; M.S. Sotirova; G.D. Beshkov; E.N. Stefanov 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 717 KB

Chemical vapour deposition of silicon fi

✍ M. Janai 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 48 KB